Language：English   Publishing type：Research paper (scientific journal)   Publisher：IOP Publishing  

Abstract

Cryogenic environments are increasingly used in scientific and industrial fields. Recently, cryogenic environments are also used for storage and supply of liquid hydrogen, which is considered essential for the realization of a decarbonized society. Actuators to drive a valve that controls such a low-temperature fluid are required. In this study, a piezoelectric transducer that can be driven in the cryogenic environment has been fabricated and evaluated. Although the performance of piezoelectric elements degrades at cryogenic temperatures in general, the application of a preload can suppress the degradation of performance. Equivalent circuits were used for evaluation, and force factors and figures of merit were compared. As a result, the force factor was as high as that at RT even at cryogenic temperatures, and a high figure of merit was obtained. The result indicates that the transducer can be used for the driving of micro actuator at cryogenic temperature.

DOI： 10.35848/1347-4065/ad1e9b

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Other Link： https://iopscience.iop.org/article/10.35848/1347-4065/ad1e9b/pdf

Language：English   Publishing type：Research paper (scientific journal)   Publisher：Wiley  

Abstract

In the fields of medical and sports science, it is required to evaluate muscle activity qualitatively and quantitatively. Currently, mechanomyogram (MMG) that can reflect the mechanical activity of muscle fibers is attracting attention. The purpose of this study is to develop a sensor that can measure MMG during exercise. In this study, a small and flexible MMG sensor using P(VDF/TrFE), which is a piezoelectric polymer material, spun into nanofibers by the electrospinning method has been fabricated and evaluated. By the fabricated electrospinning equipment and the obtained fabrication conditions of the nanofibers MMG sensor has been fabricated by using piezoelectric polymer fibers. By using nanofiber nonwoven fabric for the sensor element, the flexible sensor has been realized. In a sound wave reception experiment assuming MMG measurement, the P(VDF/TrFE) nonwoven fabric element showed that the element detected the sound pressure. Additionally, MMG during isometric contraction and pedaling motion has been measured using the fabricated sensor. The results show that the proposed sensor is effective for measuring MMG during exercise.

DOI： 10.1002/ecj.12434

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Language：Japanese   Publishing type：Research paper (scientific journal)   Publisher：Institute of Electrical Engineers of Japan (IEE Japan)  

DOI： 10.1541/ieejsmas.143.313

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Language：English   Publishing type：Research paper (scientific journal)   Publisher：MDPI AG  

A thin McKibben artificial muscle is a pneumatic actuator with an outer diameter of only 1.8 mm. We fabricated a string-shaped actuator called an “active string actuator,” which achieves a high contractile displacement by accumulating thin McKibben artificial muscles. To control the displacement, the length of the active string actuator should be estimated. However, this is difficult because bulky and rigid sensors are unsuitable for the sensor element of the active string actuator. Therefore, in this study, we propose a new sensing method for estimating the length of an active string actuator. The proposed sensing system is simple and comprises only three components: a step-index multimode optical fiber, a light emitter, and a light receiver. A step-index multimode optical fiber was combined with the active string actuator, and the length was estimated from the change in the amount of light propagating in the optical fiber when the active string actuator was driven. Fundamental experiments were conducted in this study, and the results demonstrated that the optical fiber sensor value changed with the actuator length. This suggests that it is possible to estimate the displacement of an active string actuator using an optical fiber sensor.

DOI： 10.3390/s22093232

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Authorship：Corresponding author   Language：English   Publishing type：Research paper (scientific journal)   Publisher：MDPI AG  

Droplets with a core–shell structure formed from two immiscible liquids are used in various industrial field owing to their useful physical and chemical characteristics. Efficient generation of uniform core–shell droplets plays an important role in terms of productivity. In this study, monodisperse core-shell droplets were efficiently generated using a flexural bolt-clamped Langevin-type transducer and two micropore plates. Water and silicone oil were used as core and shell phases, respectively, to form core–shell droplets in air. When the applied pressure of the core phase, the applied pressure of the shell phase, and the vibration velocity in the micropore were 200 kPa, 150 kPa, and 8.2 mm/s, respectively, the average diameter and coefficient of variation of the droplets were 207.7 μm and 1.6%, respectively. A production rate of 29,000 core–shell droplets per second was achieved. This result shows that the developed device is effective for generating monodisperse core–shell droplets.

DOI： 10.3390/act10030055

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Language：Japanese   Publishing type：Research paper (scientific journal)   Publisher：Institute of Electrical Engineers of Japan (IEE Japan)  

DOI： 10.1541/ieejsmas.141.44

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Language：English   Publishing type：Research paper (scientific journal)   Publisher：Elsevier BV  

DOI： 10.1016/j.sna.2020.112363

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Language：English   Publishing type：Research paper (scientific journal)   Publisher：Fuji Technology Press Ltd.  

In this study, a pneumatically contracting active cloth has been developed; its application is proposed for a safe sitting-posture recovery system for wheelchair users to avoid fall-related accidents. The active cloth consists of thin artificial muscles knitted via a flat string machine. The safe wheelchair system is configured with an active cloth and seating pressure sensor. The seating pressure sensor, located on the seating surface of the wheelchair, estimates the inclination of the upper body of the user; when this reaches an angle that is dangerous for falling from the wheelchair, the active cloth contracts to correct the posture of the upper body. In this paper, we clarify the fabrication process and fundamental characteristics of the active cloth and indicate its potential as a mechanical element for welfare apparatuses by demonstrating a safe wheelchair system.

DOI： 10.20965/jrm.2020.p1010

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Language：English   Publishing type：Research paper (scientific journal)   Publisher：Fuji Technology Press Ltd.  

It is known that introducing a pediatric externally powered prosthetic hand from an early age has certain merits such as the recovery of body image. However, this process is not popular in Japan. The high cost and technological problems of the hand have resulted in difficulty in its popularization. The pediatric prosthetic hand must be lighter and smaller than the adult one. Furthermore, parents of users prefer a prosthetic hand, such as a human arm and hand. We developed a prosthetic hand that demonstrates certain functionalities and appearances similar to a real human hand. The prosthetic hand consists of miniature McKibben actuators and is manufactured from acrylonitrile-butadiene-styrene resin and covered by a silicon glove. It has flexible joint structures and can grasp objects of various shapes. In this paper, we present a prototype of the pediatric prosthetic hand and the results of gripping experiments, bending and extension of finger experiments, and user tests.

DOI： 10.20965/jrm.2020.p1034

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Language：Japanese   Publishing type：Research paper (scientific journal)   Publisher：The Japan Fluid Power Systems Society  

DOI： 10.5739/jfps.51.25

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Language：English   Publishing type：Research paper (scientific journal)   Publisher：Wiley  

DOI： 10.1002/ecj.12245

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Other Link： https://onlinelibrary.wiley.com/doi/full-xml/10.1002/ecj.12245

Language：Japanese   Publishing type：Research paper (scientific journal)  

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Language：English   Publishing type：Research paper (international conference proceedings)  

DOI： 10.1016/j.sna.2019.06.012

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Language：English   Publishing type：Research paper (scientific journal)  

DOI： 10.3390/act8020040

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Publishing type：Part of collection (book)  

Hydraulic components have tremendous potential for realizing “tough robots” owing to their “tough features,” including high power density and shock resistance, although their practical robotic usage faces some challenges. This chapter explains a series of studies on hydraulic robot components, focusing on high output density, large generative force, shock resistance, and environmental resistance to investigate reducing size, increasing intelligence, lowering weight, achieving multiple degrees of freedom, and lowering sliding friction. The studies are based on past hydraulics technologies with the aim of permitting hydraulic actuator technologies to take important roles in achieving tough robots to operate at disaster sites and under other extreme environments. The studies consist of research and development of compact, lightweight, and high-output actuators; rotating high-torque motors; low-sliding cylinders and motors; power packs; high-output McKibben artificial muscles; particle-excitation-type control valves; hybrid boosters; and hydraulic control systems to be undertaken along with research on their application to tough robots.

DOI： 10.1007/978-3-030-05321-5_8

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Language：English   Publishing type：Research paper (scientific journal)   Publisher：The Japan Fluid Power Systems Society  

DOI： 10.5739/jfpsij.11.9

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Language：English   Publishing type：Research paper (scientific journal)   Publisher：Robotics Society of Japan  

Robots composed of hydraulic actuators have been utilized in various fields and at disaster sites. However, the hydraulic control system for multiple-degree-of-freedom mechanisms is large because such systems require many control components. The purpose of this research was to develop a small hydraulic flow control valve. This paper describes the fabrication and evaluation of a small three-way valve by particle excitation using a piezoelectric transducer. This valve consists of two transducers and can switch the inlet and outlet ports by applying an AC voltage of different driving frequencies to each transducer because each transducer has different resonant frequencies. The flow rate was controlled by applying a voltage to the piezoelectric transducer. We evaluated the vibration characteristics of the fabricated three-way valve. The vibration velocity exhibited peaks at 120 and 155 kHz for the inlet and outlet port, respectively, and that of each transducer increased with the applied voltage. Therefore, this three-way valve can switch the opening port by changing the driving frequencies and continuously controlling the flow rate. As a result, we have succeeded in driving the novel small three-way valve.

DOI： 10.1080/01691864.2018.1454848

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Language：Japanese   Publishing type：Research paper (scientific journal)   Publisher：Institute of Electrical Engineers of Japan  

The microreactor has attracted attentions because the microrecter can realise a new phenomenon and a new reaction in the field of micro-chemical process. In this study, a temperature controlled microreactor system using a microchannel of stainless steel and a Peltier device has been developed. In this system, the temperature device made of the microchannel device has been controlled from 8.7°C to 65.8°C. The hot fluid has been quenched successfully. To evaluate the performance of this system, a recrystallization of alum has been used. In this temperature controlled microreactor system, the average particle diameter and standard deviation were 9.2 and 10.1um when air flow rate and solution flow rate were 452 and 2.4ml/min. These results show that the proposed system has realized the miniaturization and uniformization of the alum crystals. As a result, the effectiveness of this system has been indicated.

DOI： 10.1541/ieejsmas.138.87

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Language：Japanese   Publishing type：Research paper (scientific journal)  

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DOI： 10.1541/ieejsmas.138.394

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DOI： 10.5739/jfps.49.10

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Language：English   Publishing type：Research paper (scientific journal)   Publisher：Springer International Publishing  

This paper reports an improvement of the particle-excitation flow control valve. The valve that we have designed in previous reports can control air flow, using particle excitation by piezoelectric resonance, and has the following advantages: small size, lightweight, high response and continuous airflow control. However, in our previous models, the relationship between the driving voltage and the flow quantity was nonlinear. In this report, we improved the valve to realize proportional flow control. The valve consists of the orifice plate, that has some orifices, and steel particles to seal the orifices and piezoelectric transducer. It controls air flow by the voltage applied to the transducer. For proportional flow control, it is important to adjust the orifice position adequately. In this report, we optimized the orifice position, considering resonance condition of the valve. We designed the experimental prototype using a bolt-clamped Langevin type transducer and decided orifice position. And we evaluated its vibration properties and flow-rate characteristics. The experimental results showed that our designed prototype can proportionally control airflow.

DOI： 10.1186/s40648-017-0093-3

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Language：English   Publishing type：Research paper (international conference proceedings)   Publisher：IEEE Computer Society  

Nanoparticles have been required in the fields such as medicine, foods and electronic materials. By re-crystallization process, nanoparticles can be formed by quenching a solution. We have generated mono-disperse droplets by using a torsional bolt-clamped Langevin-type transducer and a micropore plate to form fine nanoparticles by quenching the droplets.

DOI： 10.1109/ULTSYM.2017.8092016

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Language：English   Publishing type：Research paper (scientific journal)   Publisher：Institute of Electrical Engineers of Japan  

This paper describes an improved particle-excitation flow-control valve with high flow rate and controllability. The proposed control valve has a small volume, is lightweight, and can smoothly control the airflow through particle excitation. Pneumatic actuators, which have many advantages, are widely used in automation machine equipment and are expected to be used in robots. In general, such highly controllable pneumatic-control devices used as proportional valves are large-scale, heavy, and exhibit low response. We have developed a new flow-control valve called a particle-excitation flow-control valve, which has a simple structure with a lead zirconium titanate (PZT) resonance mode, large control-flow rate, and is lightweight. Further, this valve is expected to be highly responsive because it is driven by a PZT vibrator. In this study, we designed an experimental prototype to increase the maximum flow rate and measured its flow control and response characteristics. Moreover, we showed that this control valve has high controllability and control flow rate.

DOI： 10.1541/ieejsmas.137.32

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DOI： 10.5739/jfpsij.10.38

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Language：English   Publishing type：Research paper (scientific journal)   Publisher：Springer International Publishing  

Gas/liquid phase changes produce large volume changes in working fluids. These volume changes are used as the driving power sources in actuators such as micro-pumps and valves. Most of these actuators are utilized in ordinary temperature environments. However, the temperature range in which the phase change actuator can operate depends on the characteristics of the working fluid. We hypothesized that proper selection of the working fluid and the structure of the actuator can enable such actuators to be applied not only in ordinary environments but also in high temperature environments. Consequently, in this paper, we discuss the design and fabrication of a new gas/liquid phase change actuator for use in high temperature environments. Our proposed actuator consists of a bellow body, spring, heater, and working fluid. We used the Inconel super alloy, which is highly heat and corrosion resistant, for the bellow and moving parts of the actuator. For the working fluid, we prepared triethylene glycol, which has a boiling point of 287.3 °C and very low vapor pressure at ordinary temperature. As a result, our proposed actuator can be utilized in high temperature environments up to 300.0 °C. The results of several experiments conducted confirm that our proposed actuator generates 1.67 mm maximum displacement in a 300.0 °C atmospheric environment. In addition, we confirmed that the operation of the actuator is stable in that environment. Our results confirm that a gas/liquid phase change actuator can be used in high temperature environments.

DOI： 10.1186/s40648-016-0041-7

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Language：English   Publishing type：Research paper (international conference proceedings)   Publisher：Institute of Electrical and Electronics Engineers Inc.  

An ultrasonic emulsification device has been fabricated and evaluated. The device is for the generation of nano-sized droplets for drags and consists of a piezoelectric device and metal plates. Microchannel plates made of stainless steel has been used for the device. The oscillation frequency was over 2 MHz and sub-micron size droplets has been obtained successfully. Additionally, the state in the microchannel has been evaluated using a micro cavitation sensor installed in the channel.

DOI： 10.1109/NANO.2016.7751382

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Language：English   Publishing type：Research paper (scientific journal)   Publisher：Fuji Technology Press  

DOI： 10.20965/IJAT.2016.P0469

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Language：English   Publishing type：Research paper (scientific journal)   Publisher：IOP PUBLISHING LTD  

In previous works, ultrasonic emulsification was realized using small microchannel devices oscillated by piezoelectric transducers. By using the devices, the emulsification in the flow process was also realized. In these devices, the driving frequency was higher than 2 MHz. This value is higher than the maximum audible field. On the other hand, the frequency is too high to utilize the cavitation effect. This is because the cavitation threshold depends on the frequency. The aim of this study is to confirm the cavitation state in the microchannel device using a piezoelectric polymer sensor. A micropatterned cavitation detection sensor has been fabricated by a photolithography technique and evaluated in a high-intensity ultrasound field. The emulsification state in the microchannel device has been evaluated using the fabricated sensor. (C) 2016 The Japan Society of Applied Physics

DOI： 10.7567/JJAP.55.07KE07

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Language：Japanese   Publisher：The Japan Society for Precision Engineering  

DOI： 10.11522/pscjspe.2016S.0_385

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Language：English   Publishing type：Research paper (scientific journal)  

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Language：English   Publishing type：Research paper (international conference proceedings)   Publisher：IEEE  

Pneumatic actuators are widely used because they are lightweight and inexpensive. However, highly controllable devices for pneumatic actuators generally have large volume and low response and are heavy. We have developed the flow control valves that have highly controllable using PZT elements. These control valves can downsize the control valve with high response. Using a PZT transducer, we introduced a new mechanism of the control valve for stable continuous flow rate. In this report, we proposed a new mechanism to realize stable continuous flow with a PZT transducer. We designed prototype using a bolt-clamped Langevin transducer (BLT) and show the characteristics of the valve.

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Language：Japanese   Publishing type：Research paper (scientific journal)  

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Language：English   Publishing type：Research paper (international conference proceedings)   Publisher：IEEE  

In this study, a torsional transducer type ultrasonic motor which realizes the continuous rotation and the positioning of the angle in cryogenic temperature has been fabricated and evaluated. In the cryogenic temperature environment, the performance of the transducer falls. In order to drive the motor at cryogenic temperature, the torsional transducer is designed to generate the resonant stick-slip drive. The transducer can perform the resonant stick-slip drive by combining the first and the second vibration modes. The ultrasonic motor using the transducer was evaluated. The rotation speed and the starting torque are 111 rpm and 0.75 mNm at 4.5 K.

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DOI： 10.1007/s00419-015-0989-4

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Language：Japanese   Publishing type：Research paper (scientific journal)   Publisher：Institute of Electrical Engineers of Japan  

In this study, we have fabricated a droplet manipulation device which has a microchannel oscillated by piezoelectric actuator. This device can manipulate droplets by producing a pressure distribution of a standing acoustic field caused by ultrasonic vibration in the microchannel. The manipulated droplet's size has been estimated from the relationship between acoustic force and viscous force. The device has been designed by using a finite element method analysis. Fabricated device has been evaluated by observing droplets in manipulation experiment and measuring a manipulated droplet's distribution. When n-dodecane was used as dispersed phase, this device can manipulate a droplet whose diameter is larger than 20μm when the applied voltage and the driving frequency were 80Vp-p and 2.25MHz. When Silicone oil was used as dispersed phase, the manipulated droplets diameter was larger than 15μm. From these results, we have indicated that the microchannel device can manipulate droplets by using ultrasonic vibration.

DOI： 10.1541/ieejsmas.136.348

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Language：English   Publishing type：Research paper (scientific journal)   Publisher：Fuji Technology Press  

This manuscript explains the employment of flexible actuators to act as a soft robot and transporting agent to assist medical X-ray examinations. Although soft robots from silicone material can be transparence and a human compliance used as medical assistive devices, soft robots have some problems: they tend to be sluggish, have long and imprecise gait trajectories, and need their control parameters to be adjusted for motion diversion. A soft robot with omnidirectional locomotion has been created, one that has a combination of pneumatic rubber legs that form a soft robot platform and an associated hardware setup. Tests have confirmed its omnidirectional locomotion ability
it has a maximum speed of 6.90 mm/s in forward locomotion and a maximum payload of 70 g. These features indicate that the robot can be used as a medical assistive device for fluoroscopy examinations.

DOI： 10.20965/ijat.2016.p0494

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DOI： 10.5739/jfps.47.39

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Language：Japanese   Publisher：The Japan Society for Precision Engineering  

In many fields, such as electronic material and medicine, it is an important subject to generate small and monodispersity droplets of various liquids. In this study, to generate micro droplets for a chemical manufacturing process, we have designed and fabricated a system using a bolt-clamped Langevin-type transducer and the micropore plate in order to generate micro droplets. First, we observed the range of applied pressure to generate uniform droplets. As a result, the condition depends on the kinematic viscosity of continuous phase. Next, we investigated the droplet generation condition when the droplets are in monodisperse, when the droplets are generated in the flowing ambient liquid.

DOI： 10.11522/pscjspe.2015A.0_887

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DOI： 10.5739/jfps.46.7

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Language：English   Publishing type：Research paper (international conference proceedings)   Publisher：IEEE  

The aim of this paper is to realize a new sample spinning unit for a solid-state nuclear magnetic resonance (NMR). In the solid-state NMR analysis, a sample spinning in high magnetic field is an important function. We have designed and fabricated the sample spinning unit using a low-profile ultrasonic motor for high magnetic field. The unit could be driven in high magnetic flux at 9.4 T. Soli-state NMR analysis of glycine was measured using the unit. We have succeeded in applying the ultrasonic motor for solid-state NMR analysis.

DOI： 10.1109/ULTSYM.2014.0214

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Light-driven actuators result in the miniaturization of micro-devices because such actuators can be driven by a non-contact energy supply. PLZT is a ferroelectric material that exhibits a photostrictive effect. We have succeeded in driving a photoresponse actuator by using the PLZT film. The PLZT film was deposited on a titanium substrate by using the hydrothermal method. The PLZT film was evaluated by x-ray diffraction and piezoelectricity. The actuator has a simple structure in which an indium tin oxide (ITO) transparent electrode is deposited on the surface of the PLZT film. The actuator is driven by the ultraviolet (UV) light. To confirm the driven phenomenon, the photoresponse drive was evaluated by measuring the displacement, electric current and surface temperature. As an example of a light-driven application using the PLZT film actuator, we also fabricated and evaluated a light-driven valve. We have succeeded in changing the flow rate when the intensity of the UV light increased. © 2013 The Institute of Electrical Engineers of Japan.

DOI： 10.1541/ieejsmas.133.330

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Language：English   Publishing type：Research paper (scientific journal)   Publisher：Fuji Technology Press  

This paper presents the design, fabrication process, and evaluation of an ultrasonic motor for sample spinning in a high magnetic field of solid-state Nuclear Magnetic Resonance (NMR). To decrease effects of the magnetic field on rotation, all motor components are made of materials that have low magnetic permeability. The motor, including the sample casing, is a maximum 31 mm in diameter and 50 mm high. The motor has two sector-shaped piezoelectric transducers. One transducer generates two different vibration modes, longitudinal and flexural, when two sinusoidal voltages are applied to transducers. To confirm that transducers can be driven in a high magnetic field, the effect of the magnetic field on the transducer was evaluated. The motor was driven at a frequency of 329.0 kHz. The maximum rotation speed and starting torque were 1.50 × 103 rpm and 26 μ Nm when applied voltage was 40 Vp-p. The rotation speed, controlled by a proportional-integral control system, was 1.20 × 103 rpm in a 7.0-T magnetic field. The motor was also applied to the sample spinning system of a high-resolution NMR spectrometer. We succeeded in obtaining 1 H-NMR signals of H2 O. The motor can therefore be used for a sample spinning system in a high magnetic field.

DOI： 10.20965/jrm.2013.p0384

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Language：English   Publishing type：Research paper (scientific journal)   Publisher：ELSEVIER SCIENCE SA  

This paper reports on generating micro and uniform droplets in various viscosity liquids by using a micropore plate oscillated by an ultrasonic torsional transducer. When the micropore plate was not oscillated, generated droplet diameter was not stable. On the other hand, when the micropore plate was oscillated, generated droplets became small and uniform by ruffling the liquid column surface. Droplets were generated experimentally in the air by using pure water and silicone oil of various viscosities and then evaluated. We have designed the ultrasonic torsional transducer and a droplet generation device to apply a high pressure for the use of higher viscosity liquids. We have succeeded in generating droplets by using pure water when the ultrasonic torsional transducer and the micropore plate that had an 18-mu m-diameter micropore were used. The average diameter of droplets was 30.0 mu m and the standard deviation was 0.98. We have also succeeded in generating 50-cSt silicone oil droplets by using the droplet generation device and the micropore plate that had the 50-mu m-diameter micropore. The average diameter of droplets was 98.0 mu m and the standard deviation was 0.76. (C) 2012 Elsevier B.V. All rights reserved.

DOI： 10.1016/j.sna.2012.08.007

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In this study, a small ultrasonic motor driven under cryogenic temperature conditions has been fabricated and evaluated.
Since transducer performance generally decreases at cryogenic temperatures, we designed and fabricated a bolt-clamped Langevin-type transducer for operation at cryogenic temperature. We simulated the influence of thermal stress on the transducer. The results from simulation were used to design the transducer, and it was then used to fabricate an ultrasonic motor for cryogenic temperature. The maximum diameter and the height of the motor are 30 mm and 38.7 mm.
To enable the motor to be driven at cryogenic temperature, we evaluated the relationship between the contact pre-load and the lowest rotatable temperature. The motor's driving performance was evaluated at both room temperature and cryogenic temperatures. In a 4.5 K helium gas ambient, the rotation speed and starting torque were 133 rpm and 0.03 mu N m when the applied voltage was 50 Vp-p. (C) 2012 Elsevier B.V. All rights reserved.

DOI： 10.1016/j.sna.2012.06.024

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Language：English   Publishing type：Research paper (scientific journal)   Publisher：JAPAN SOC APPLIED PHYSICS  

In this study, an ultrasonic motor for use at ultralow temperatures has been fabricated and evaluated. The motor has a bolt-clamped Langevin-type transducer using lead magnesium niobate-lead titanate (PMN-PT) single crystal. The transducer is proposed as an oscillator for use at ultralow temperatures by simulation of the thermal stress and evaluation of the pre-load. The thermal effect of the transducer was evaluated when the temperature was changed. As a result, the pre-load of the transducer was concluded to be affected by thermal stress. In addition, the ultrasonic motor using the transducer was fabricated and evaluated. By adjusting the contact pre-load between the rotor and the transducer, the motor has successfully rotated at an ultralow temperature. The rotation speed was 144 rpm at 4.4 K when the applied voltage was 150 Vp-p. This rotation speed is larger than that of previous same size actuators that can be used at ultralow temperatures. (C) 2012 The Japan Society of Applied Physics

DOI： 10.1143/JJAP.51.07GE09

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Language：English   Publishing type：Research paper (international conference proceedings)   Publisher：IEEE  

In this paper, PZT film has been deposited on Ti substrate by using a hydrothermal method. The hydrothermal reaction solution was stirred by 2 types of methods. One mixing method was a rotation mixing method and the other was an ultrasonic vibration mixing method. Bimorph actuators were fabricated and evaluated with displacement measurement. Because of holding the autoclave, the ultrasonic vibration mixing device was less of a load to the substrate. Therefore, micropositioning stage has been fabricated on a comparatively large and high-aspect ratio titanium structure by using the ultrasonic vibration mixing device. The hydrothermal method can easily deposit on the three-dimensional substrate. Thus, we have deposited PZT film on a hemispherical shape Ti substrate and fabricated an ultrasonic transducer by using the rotation mixing device. The ultrasonic transducer was evaluated by under water experiment.

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Language：Japanese   Publisher：The Japan Fluid Power System Society  

The purpose of this study is the development of a valve that can precisely control pneumatic cylinders. The valve is lightweight and has simple structure. The valve uses a piezoelectric oscillator which is driven in the resonance mode, and it can control flow rate by controlling the amplitude of the particle excitation. In this report, we have designed a new prototype for the purpose of high controllability. We have applied a non-linear control algorithm to control Q-V nonlinearlity of this valve. We found that this control works well to realize linear Q-V characteristics.

DOI： 10.5739/jfps.43.117

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Language：English   Publishing type：Research paper (scientific journal)   Publisher：ELSEVIER SCIENCE SA  

In this article, we report a new particle-excitation flow control valve. The purpose of this study is the development of a particle-excitation flow control valve that can precisely control pneumatic cylinders. We have reported this flow control valve principle. The valve, driven by a PZT vibrator, has a simple lightweight structure with large flow rate. We report the relationship between the orifice arrangement and flow rate characteristics of the valve. We have designed a new prototype for the purpose of high controllability. We have measured flow-rate characteristics and confirmed the conditions necessary for continuous adjustment of flow quantity. The control valve works successfully to realize a change in flow rate. (C) 2011 Elsevier B.V. All rights reserved.

DOI： 10.1016/j.sna.2011.07.009

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Language：English   Publishing type：Research paper (international conference proceedings)   Publisher：IEEE Computer Society  

Monodisperse droplets have been an important subject in fields such as electronic materials, cosmetics productions and medical science. The goal of this study is to generate micro and uniform droplets in various viscosity liquids by using a micropore plate oscillated by an ultrasonic torsional transducer. When the micropore plate was not oscillated, droplets were generated irregularly. On the other hand, when the micropore plate was oscillated by the ultrasonic torsional transducer, droplets were generated regularly by ruffling liquid surface. We have generated droplets in the air by using pure water and silicone oil of various viscosities and evaluated droplets. We have designed the ultrasonic torsional transducer and a droplet generation device to apply a high pressure for the use of higher viscosity liquids. We have succeeded in generating droplets by using pure water when we used the ultrasonic torsional transducer. The average diameter of droplets was 30.0μm and the standard deviation was 0.98. We have also succeeded in generating 50cSt silicone oil droplets using the droplet generation device. The average diameter of droplets was 98.0μm and the standard deviation was 0.76. © 2011 IEEE.

DOI： 10.1109/MHS.2011.6102165

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Language：English   Publishing type：Research paper (scientific journal)   Publisher：ELSEVIER SCIENCE SA  

Pneumatic actuators have several advantages such as light weight safety low cost and high compliance However many pneumatic actuators have complicated systems that include a compressor air tubes and pneumatic valves with electrical wires This research proposes a new control method for a multiplex pneumatic transmission constructed with special resonant valves and air tubes with a control system driven by air vibration in air tubes without electrical wires The control is simplified and effective for pneumatic systems having many degrees of freedom In this paper the development of a primitive model of the resonant valve and a prototype valve is described In addition two control methods which are a superimposing method and a time-sharing method are shown and the independent driving of four actuators is realized by using one of the control methods with air tubes only (c) 2010 Elsevier B V All rights reserved

DOI： 10.1016/j.sna.2010.09.004

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Language：Japanese   Publishing type：Research paper (scientific journal)  

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Language：English   Publishing type：Research paper (international conference proceedings)  

The goal of this study is to realize an emulsification device for the generation of sub-micron size monodisperse emulsions. We have fabricated and tested the device which consists of a microchannel plate and an ultrasonic vibrating plate. The device can realize continuous flow system and those plates are easily stacked. We have succeeded in generating emulsions which has a diameter of 80 nm. ©2010 IEEE.

DOI： 10.1109/MHS.2010.5669586

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Language：English   Publishing type：Part of collection (book)   Publisher：Springer London  

This chapter describes micro actuator systems for narrow spaces under specific environments. In the fields of scientific or medical instruments, there is a great demand for micro sensors and actuators. We have fabricated some micro sensors and actuators which can be used under such specific environment. Two types of micro actuator systems for narrow spaces have been fabricated and evaluated. Those are for precise tool control unit and attitude control unit. In the precise tool control unit, a micro servo motor using the micro ultrasonic motor and the magnetic encoder have been designed and fabricated. In the attitude control, flexible displacement sensor made of piezoelectric polymer and shape memory alloy actuator driven by optical source. © 2010 Springer-Verlag London.

DOI： 10.1007/978-1-84882-991-6_32

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Language：English   Publishing type：Research paper (scientific journal)   Publisher：IOP PUBLISHING LTD  

In this study, a device using an ultrasonic vibration and a microchannel has been developed to obtain emulsions. The process of generating emulsions involves a Y-type microchannel and an ultrasonic device. Once micron-sized emulsions were generated by the Y-type microchannel, the micron-sized emulsions were sonicated using ultrasonic vibration to produce emulsions. Although the diameter of emulsions was 30 mu m using the Y-type microchannel, the diameter of the sonicated emulsions was about 200 nm. In addition, as the applied voltage was increased, sonicated emulsions became smaller and the distribution became sharper. (C) 2010 The Japan Society of Applied Physics

DOI： 10.1143/JJAP.49.07HE13

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Authorship：Lead author   Language：English   Publishing type：Research paper (scientific journal)  

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Language：Japanese   Publisher：公益社団法人 化学工学会  

DOI： 10.11491/scej.2010f.0.55.0

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Language：English   Publishing type：Research paper (international conference proceedings)  

Pneumatic actuators have several advantages, which are high compliance, light weight, safety, and cheapness. However, a pneumatic system is complicated because of electric wires and air supply lines from solenoid valve and compressor. We aim to simplify pneumatic system and proposed a new control method. The developed pneumatic system which is called multiplex pneumatic system is driven by air resonance vibration remotely witbout electric wires. Valves of the system have different resonance systems inside it each. When many actuators are driven by the valves this system is possible to drive the actuators independently using only one air tube supply. This system will be effective to the pneumatic system having many degrees of freedom. In this paper, in this paper, the experimental evaluation of four prototype valves for independent control is described. In addition tbe independent control of four pneumatic cylinders using a time-sharing method for multi driving is succeeded. © 2010 TSI Press.

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Pneumatic actuators have several advantages, which are high compliance, light weight, safety, and low-cost. Valve that can realize a continuous flowing quantity control is necessary to control pneumatic actuators precisely, while in general, such a valve is large. This study aims at the development of a new flow control valve that has a lightweight and simple structure can control flow-rate continuously. This valve uses piezoelectric transducer which is driven at resonance mode and it can control flow-rate by controlling the amplitude of the particles excitation. The flow control valve in this report is 10 mm in diameter, 9 mm in height and 2.5 g. We had already achieved ON/OFF control of large flowing quantity with the valve. In this report, we research dynamic characteristics of the valve. As the results of experiments, we found that the valve response time is 29 ms and flow rate change is almost equal to control signal. © 2010 TSI Press.

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Language：English   Publishing type：Research paper (scientific journal)   Publisher：ELSEVIER SCIENCE SA  

This paper reports on droplet generation by using a torsional bolt-clamped Langevin-type transducer and a micropore plate. When the micropore plate was not oscillated, droplets were generated irregularly. On the other hand, when the micropore plate was oscillated, droplets were generated regularly. In addition, by changing the micropore diameter, the generated droplets' diameter was varied in proportion to the micropore area. Under the condition that the pore diameter, the vibrational amplitude and the resonance frequency were 16 mu m, 0.62 mu m(p-p) and 56 kHz, respectively, the average diameter of droplets was 26.8 mu m and the standard deviation was 1.4. Additionally, W/O (water-in-oil) emulsions were generated in air-liquid phase by the transducer. Under the same condition, generated average diameter of emulsions was 35.0 mu m, the standard deviation was 1.9 and the coefficient of variance was 5.5. From this result, monodisperse emulsions were generated. (C) 2009 Elsevier B.V. All rights reserved.

DOI： 10.1016/j.sna.2009.08.007

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Language：English   Publishing type：Research paper (scientific journal)   Publisher：ELSEVIER SCIENCE SA  

This paper reports a new flow control valve for pneumatic actuators that has a lightweight and simple structure and uses particle excitation by PZT vibrator. The flow control valve in this report consists of an orifice plate which has plural orifices, PZT vibrator which is adhered on the orifice plate and iron particles. The valve is normally closed. because air flow carries the particles on to the orifice and particles seal the air flow. Because the orifice plate excitation by the PZT vibrator works to make the particles away from the orifice plate, the air flows through the orifices. It is driven at resonance mode and can be used as a variable speed controller for pneumatic actuators. The new flow control valve avoids the stopping shock of pneumatic actuators at the stroke ends while retaining the advantages of pneumatic actuators. (C) 2009 Elsevier B.V. All rights reserved.

DOI： 10.1016/j.sna.2009.07.005

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Recently, the demand for instruments that use high magnetic fields has increased in scientific and industrial fields. A high-resolution solid-state nuclear magnetic resonance (NMR) system is one such example. In a solid-state NMR, analytical samples are required to spin accurately at high speed in the high magnetic field. Ultrasonic motors have advantages in such environments. This research aims to develop a cylindrical micro ultrasonic motor for the solid-sate NMR. We fabricated a cylindrical ultrasonic motor mainly using nonmagnetic materials. The motor's maximum diameter and the height are 11 and 47.9 mm, including the sample case. We evaluated its driving performance in a magnetic field of 7 T. In addition, we successfully obtained the 1H-NMR signals of H2O with the motor. The result shows the NMR ultrasonic motor is available for the sample spinning of the solid-state NMR. ©2009 IEEE.

DOI： 10.1109/ULTSYM.2009.5441838

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Language：English   Publishing type：Research paper (international conference proceedings)   Publisher：Institute of Electrical and Electronics Engineers Inc.  

This paper reports a flow control valve for pneumatic actuators. This flow control valve has a lightweight and simple structure using particle excitation by PZT transducer, which is driven at resonance mode and it can be used as a variable speed controller for pneumatic actuators. A PZT transducer has been used for controlling flow rate in this study. The flow control valve in this report consists of an orifice plate, a PZT transducer which is fixed on the orifice plate with the bolt, and the iron particles of 0.8mm diameter. From the experiments of flowing quantity evaluation, this flow control valve achieves a maximum flow rate of 62.65 L/min under applying voltage of 79.9 Vp-p and air pressure of 0.70 MPa. The results show that the ratio of the flow capacity /valve weight is about ten times larger than that of typical commercial valves. ©2009 IEEE.

DOI： 10.1109/ULTSYM.2009.5441678

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Language：English   Publishing type：Research paper (scientific journal)   Publisher：ELSEVIER SCIENCE SA  

This paper reports on the fabrication procedure and the evaluation of a sensor with a flexible structure. Recently, because welfare robots with soft structures are being developed, there has been considerable progress in developing various soft actuators. Usually, however, sensors have high stiffness and diminish the compliance of soft actuators. In this study, a soft actuator's displacement was detected with a flexible displacement sensor using deposited conductive paste film. When the film was deformed, the sensor's electrical resistance changed, making a large deformation detectable. Initially, a flat type displacement sensor was fabricated, and its basic characteristics were evaluated. Then, an optimal wave patterning method that improved on the sensor signal's linearity was proposed. Finally, the flexible displacement sensor was formed onto the surface of a flexible microactuator (FMA). A servo control for the soft actuator was constructed with the flexible displacement sensor and high positioning accuracy was demonstrated. (c) 2007 Elsevier B.V. All rights reserved.

DOI： 10.1016/j.sna.2007.11.031

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Language：Japanese   Publisher：The Japan Society of Mechanical Engineers  

A low-profile micro ultrasonic motor has been designed and fabricated. This motor has two sector shaped vibrators. The vibrators generate elliptical motion by the 1st longitudinal mode and the 2nd bending mode. They are supported by planar elastic structure that combined with preload mechanism. Three types of pre-load systems were designed and evaluated. The diameter and thickness of one type was 9.8[mm] and 0.6[mm]. These vibrators have been oscillated around 340 [kHz]. The maximum rotation speed was 1.2 x 10^3 [rpm] and the maximum starting torque was 98.8[μNm] when the applied voltage was 20[V_<p-p>].

DOI： 10.1299/jsmemecjo.2008.7.0_149

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Language：English   Publishing type：Research paper (scientific journal)   Publisher：JAPAN SOC MECHANICAL ENGINEERS  

A pneumatic system has several advantages, which are cheapness, lightweight, and reliability to human and environment. These advantages are adapted to some research areas, such as industrial lines, medical and nursing cares, and rehabilitation tools. However, the pneumatic system needs several devices; compressor, air tube, and control valve. This research aim to downsize pneumatic system. In this paper, a new method of multiplex pneumatic transmission for multi-pneumatic servo system is proposed. The valve for this system consists of two vibrators supported by springs, which was designed with simple and cheap structure. The working principle of the valve is vibrators resonance from multiplex pneumatic transmission and it is possible to work as ON/OFF valves without electric wire. Dynamic simulation was used to confirm the working principle of the resonance driving system. A prototype device confirming the principle was designed and developed based on the simulation. The experiments show that this new control system works very well to control two separated valves through single pneumatic tube.

DOI： 10.1299/jamdsm.2.222

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Language：Japanese   Publishing type：Research paper (scientific journal)   Publisher：The Robotics Society of Japan  

We aim at the development of rescue robots which are driven by ultra high pressure hydraulic small actuators. They are small-sized and have simple mechanisms, and can realize high-powered operations. This report shows the designs of two high powered small rescue robots-Jack Robot and Cutter Robot-and the results of the field tests carried out to verify in the possibilities. We carried out the field tests in the three types of field; collapsed house type, rubble type and traffic accident type. As the experimental results, the potential of high-powered small robots in disaster areas were shown.

DOI： 10.7210/jrsj.25.761

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Other Link： https://jlc.jst.go.jp/DN/JALC/00297900618?from=CiNii

Language：Japanese   Publishing type：Research paper (scientific journal)   Publisher：The Japan Society of Naval Architects and Ocean Engineers  

This paper describes the developments of new pectoral fins made of elastic materials with the functions of flexibility and multifunctionality for biomimetic underwater vehicles to use as not only a propulsive device, but also other applications such as grippers, avoiding damages to environment by rigid fins. We developed two types of elastic pectoral fins, an actively controlled pneumatic fin and a passively controlled flexible fin in this study. We carried out the verification tests for generating the propulsive forces and FEM analyses of the behaviors of two elastic pectoral fins.

DOI： 10.2534/jjasnaoe.5.15

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Other Link： http://dl.ndl.go.jp/info:ndljp/pid/10784045

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Language：English   Publishing type：Research paper (scientific journal)   Publisher：Institute of Electrical Engineers of Japan  

Recently, research and development of the micro-fluidic systems such as μTAS and Lab-on-chip have been activated in the field of chemical technology and biotechnology. Micro-fluidic systems are realized by micromachine technology and MEMS technology. These are essential elements for miniaturization of chemical analysis reaction systems. Furthermore, micro-fluidic systems can be applied to home medical care system. Micro mixing device is an essential element for a realization of these systems. Normally, mixing of different fluids depends on turbulent flow and diffusion. But it is difficult to generate turbulent flow in minute space. Micro mixer is important to improve reaction efficiency. The aim of this research is a development of a micro rotary reactor which will be built into micro-fluidic systems. The full length and the diameter of this reactor are 59mm and 15mm, respectively. This reactor is driven by an electromagnetic actuator. Therefore, the structure of this reactor becomes very simple and it is easy to miniaturize this reactor. This reactor aims at combing two liquids and forming spiral laminar flow interfaces. Forming spiral laminar flow interfaces increase reaction surface area and reaction distance of two liquids. This paper shows the structure and the characteristics of this reactor.

DOI： 10.1541/ieejsmas.127.47

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Language：Japanese   Publisher：The Japan Society of Mechanical Engineers  

In recent years, research and development of the micro-fluidic systems have been activated in the field of chemical technology and biotechnology. Micro-fluidic systems are realized by micromachine technology and MEMS technology. Micro pump is an essential element for miniaturization of chemical analysis reaction systems. The aim of this research is development of a micro screw pump which will be incorporated in micro-fluidic systems. This pump aims to control minute amounts of liquids. This pump is 16mm in diameter and 41mm in length. The features of this pump are (1) the pump has built-in actuator, (2) liquid can be flowed in bidiretion by the pump, (3) the pump is nonpulsatile pump. In this paper, the structure and the characteristics of this pump are shown.

DOI： 10.1299/jsmemecjo.2006.4.0_113

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Language：Japanese   Publisher：The Japan Society of Mechanical Engineers  

This study aims at development of Intelligent McKibben actuator with embedded soft displacement/pressure sensors and micro valves. In this report, a soft pressure sensor made of rubber and conductive film was developed and embedded in McKibben actuator. By measuring the electrical resistance of the conductive film which changes following the deformation of the rubber with internal pressure change of the actuator, the pressure can be estimated The results of fundamental experiments to clear the characteristics of the sensor showed that it has drift phenomenon by influence of the rubber creep behavior. Therefore, we tried to apply the mechanical model to the sensor model. A 2-Voigt mechanical model which consists of two springs and two dampers could agree the sensor characteristics. Using the model, we carried out the servo control experiments. The results indicated the high efficacy of the model. Furthermore we expect that the modeling method will be able to contribute to improving accuracy of several soft mechanisms.

DOI： 10.1299/jsmemecjo.2006.4.0_115

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Language：Japanese   Publishing type：Research paper (scientific journal)   Publisher：Japan Society of Mechanical Engineers  

Recently, practical use of soft actuators is expected in the field of welfare robot. However, feedback control system for soft actuator has not been realized because appropriate sensor did not exist. Potentiometers or optical encoders which are generally used as displacement sensors have high stiffness and such sensors diminish the compliance of soft actuator. This paper presents fabrication of flexible displacement sensor and FMA (Flexible Microactuator) using this sensor. The flexible displacement sensor was fabricated by depositing conductive paste on the surface of rubber. A paste injection system was utilized to deposit the paste and it realized precise control of thickness, width and pattern of the film. Firstly, an experiment on flat type flexible displacement sensor was carried out to evaluate and improve the sensor. The experimental result showed enough linearity and detecting range. Then Intelligent FMA was fabricated by depositing conductive paste on the surface of FMA. Servo control system for Intelligent FMA was set up and high positioning accuracy was confimed by servo driving experiment.

DOI： 10.1299/kikaic.72.2512

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Language：Japanese   Publishing type：Research paper (scientific journal)   Publisher：Japan Society of Mechanical Engineers  

Some living beings both on ground and in water can move by forming traveling waves along their bodies, therefore the mechanisms using the traveling waves have the amphibious possibility. Several robots have been developed using the mechanisms, but there are no amphibious robots. In this study, our goal is development of a bio-mimetic soft cord robot which can move on ground and in water. First, we took particular note of a millipede and an eel, because they are similar to point of using the traveling waves for moving, but their living environments are different
the millipede lives on the ground and the eel lives in water, and their moving principles were cleared theoretically and confirmed by computer simulation. As the result, the relations between their moving and the progressing directions of traveling waves were made clear. Second, a soft cord robot, 915 mm in length, 11 mm in width and 5 mm in height, which was based on the principles of the millipede and the eel was developed. Finally, the experiments of the robot were carried out, and they showed that the robot could move both on the ground and in water successfully. Moreover the robot could negotiate in the curve tube without special control algorithm because of its high compliance.

DOI： 10.1299/kikaic.72.471

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In recent years, research and development of the micro-fluid systems have been activated in the field of chemical technology and biotechnology. Micro-fluid systems are realized by micromachine technology and MEMS technology. Micro pump is an essential element for miniaturization of chemical analysis reaction systems. The aim of this research is development of a micro linear pump which will be built into micro-fluid systems. This pump aims to take a sample of very-small-quantity of liquids. Taking a sample of very-small-quantity of liquids reduce the amount used and waste fluid of a reagent. Full length and diameter of this pump are 32.5mm and 6mm respectively. The features of this pump are (1) the pump is built with actuator, (2) the gap of 7μm between piston and cylinder is achieved through fine machining process, and (3) micro check-valves of 2mm diameter made of stainless-steel film are fabricated and integrated. In this paper, the structure and the characteristics of this pump were shown. And the characteristics after improvement of micro check-valves were shown. keyword: micro fluid system, micro lincar pump, sample of very small quantity, built in actuator, miniaturization. © 2005, The Institute of Electrical Engineers of Japan. All rights reserved.

DOI： 10.1541/ieejsmas.125.461

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Efficient uniform mixing is an essential process for chemical reaction. However, it is difficult to fabricate many tiny stirrers on reactor chips. This paper shows a new method promoting high-efficient chemical reaction in micro chamber. To stir chemicals and to accelerate reaction catalytic particles are driven electrostatically in micro chamber. Two driving methods have been evaluated,” AC drive and DC drive. Evaluation of chemical reactions revealed the effect of this developed devices. In addition conveyance system of catalytic particles is necessary for particles exchange. Keywords: micro reactor, electrostatic, shake, particles conveyance. © 2005, The Institute of Electrical Engineers of Japan. All rights reserved.

DOI： 10.1541/ieejsmas.125.467

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Language：Japanese   Publishing type：Research paper (scientific journal)   Publisher：Japan Society of Mechanical Engineers  

This study aims at development of Intelligent McKibben actuator, in which micro displacement/ pressure sensors and micro valves are integrated. In this first report, development of rubber displacement sensor and its application to servo system using McKibben actuator are reported. Recently McKibben actuator attracts engineers because of light weight, high output power and high compliance. But in case of servo control using it, the systems need encoders or potentiometers, so the systems tend to grow in size and to take away from compliance at present. To solve thus problems, soft rubber sensor was developed, which was made of rubber covered its surface with conductive resin thinly. Electrical resistance of rubber sensor changes in response to extending motion of the rubber. We built the rubber sensor into McKibben actuator and named it Intelligent McKibben actuator. Servo system using single Intelligent McKibben actuator was realized, and tested. Furthermore, we fabricated a robot arm system configured by two Intelligent McKibben actuators. Experimental results showed that the actuator has good potential for realizing polymer-made intelligent actuator.

DOI： 10.1299/kikaic.71.2754

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We developed an intelligent pneumatic cylinder that realizes positioning servo control using a built-in reflective optical encoder. The developed cylinder is 133mm long, the cylinder's stroke is 40mm, and positioning resolution is 338*m. In this report, we report a new adaptive control algorithm for this cylinder. This algorithm is based on a way that controls switching timing of valve to minimize overshoot of cylinder rod. We compared the adaptive control with servo control from the view point of positioning and convergence speed. We realized high speed positioning control and convergence in any positions, which is difficult for conventional pneumatic cylinders.

DOI： 10.1299/jsmemecjo.2004.4.0_263

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Language：Japanese   Publisher：The Japan Society of Mechanical Engineers  

This study aims at development of soft intelligent rubber actuator of McKibben style. McKibben rubber actuator is an artificial muscle, which is pneumatically driven. At present, almost servo systems using this rubber actuator are driven with external potentiometer or encoder. So the systems tend to grow in size and to takeaway from compliance. In the first report, a soft displacement sensor was developed, and it was incorporated in rubber actuator. We named its actuator Intelligent Rubber-actuator. In this report. We fabricated a robot arm system configured by two Intelligent Rubber-actuators set antagonistically. Experiments with its system show that Intelligent Rubber-actuator has high possibility for application of several robot systems.

DOI： 10.1299/jsmemecjo.2004.4.0_261

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Language：Japanese   Publisher：The Japan Society of Mechanical Engineers  

This paper shows two types of new functional fluidic devices for chemical micro reactors; (1) an active catalytic system and (2) a micro flask. The active catalytic system consists of a micro chamber with two electrode thin films and micro catalytic particles of 100 to 500 micron meter in diameter. Electrostatic force enables handling micro catalytic particles in micro chambers to realize uniform mixing and acceleration of chemical reactions. A micro flask is also fabricated using piezoelectric materials, which oscillates to work as a micro agitator and an ultrasonic cleaner. The potentials of these new functional fluidic devices in micro reactors are discussed.

DOI： 10.1299/jsmemecjo.2004.4.0_259

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We have fabricated a probe sensor. This sensor is for high precision coordinate measuring machines, surface roughness measuring tools, or scanning probe microscopes (SPM). This sensor consists of a rod vibrating in the axial direction. The longitudinal vibration was excited and also detected by PZT thin film. The PZT thin Him was fabricated by a hydrothermal method. The hydrothermal method uses the reaction process in hot and high pressure aqueous solutions. We made a 27.8-mm long sensor. Its resonance frequency was 116 kHz. The sensitivity and resolution were evaluated by experiments. We succeeded in oscillating the rod and detecting the contact. © 1999 IEEE.

DOI： 10.1109/58.775653

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Language：English   Publishing type：Research paper (scientific journal)   Publisher：JAPAN J APPLIED PHYSICS  

The hydrothermal method to deposit lead zirconate titanate (PZT) thin film is anew method reported by Tsurumi et al. in 1991. This method consists of two linked processes. We have found that the film deposited by the first process is not PZT but separated lead zirconate (PZ) and lead titanate (PT). In this paper, we report that a PZT thin film was successfully deposited by a single process. The chemical construction and composition of the film were analyzed. The Zr/(Zr+Ti) ratio of the PZT film was controlled by changing the ionic composition of the solution.

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DOI： 10.11522/pscjspe.2012S.0.1105.0

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DOI： 10.11522/pscjspe.2011S.0.937.0

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DOI： 10.11522/pscjspe.2010S.0.475.0

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DOI： 10.11522/pscjspe.2009S.0.629.0

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DOI： 10.11522/pscjspe.2008A.0.923.0

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DOI： 10.11522/pscjspe.2007A.0.755.0

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The aim of this research is to evaluate the driving performance of a micro ultrasonic motor, 1.8mm in casing diameter. The micro ultrasonic motor is driven by a cylindrical piezoelectric vibrator, 0.8mm in diameter. A laser surface velocimeter, an electric balance and an xyz micro stage were used for the evaluation of the relationship between the preload, the revolution speed, and the applied voltage. By using another vibration mode which had a contact with outer edge of vibrator, lager output torque was obtained. When the frequency was 314.5kHz, the applied voltage was 35V_<P-P> and the preload was 2.0mN, the maximum revolution speed was 9.1×10^3rpm and starting torque was 5.5μNm.

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We have developed three port electromagnetic valve for micro reactor. This study aims at integrating the micro three port valve into micro reactor or several micro flow control systems. For that purpose we developed the micro three port valve with actuator mechanism. Electromagnetic actuators have big power in millimeter scale in general, and achieve high response speed. We designed and manufactured micro three port valve which has a moving part of magnet. We applied the developed valve to make slug flow (two-phase flow) by pouring two liquid into this valve's ports to realize efficient promoting chemical reaction.

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The development of miniature high torque motors is essential for the realization of miniature robots which require large driving force. This is the background of this research to develop pneumatic wobble motor, which is high torque stepping motor with reduction function. Pneumatic wobble motor consists of a donut-shaped wobble generator, which is made of silicone rubber, a wobble ring, which is made of metal, and a rotor. The rotor is encased in the wobble ring, which is covered by the wobble generator. The wobble generator has three chambers and injecting air rotate. Authors had developed a six-chamber φ 10mm pneumatic wobble motor and six-chamber 6.7mm. In this study, the pneumatic wobble motor is miniaturized to φ 6mm by applying fine processing technology. Besides the number of pneumatic chambers are decreased from 6 to 3.

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In this paper, an evaluation of transducer for a micro ultrasonic motor is introduced. The motor is a traveling wave type ultrasonic motor driven by the cylindrical shaped bulk piezoelectric vibrator, a diameter of 0.8 mm and 2.2 mm. The dimensions of the motor were 1.8 mm of diameter and 5.8 mm of height. We have fabricated the transducer, the vibrator for the driving of motor, and evaluated its characteristics.

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Language：Japanese   Publisher：The Japan Society of Mechanical Engineers  

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Language：Japanese   Publisher：The Japan Society of Mechanical Engineers  

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Language：Japanese   Publisher：The Japan Society of Mechanical Engineers  

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Language：Japanese   Publisher：The Japan Society of Mechanical Engineers  

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Language：Japanese   Publisher：The Japan Society of Mechanical Engineers  

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Language：Japanese   Publisher：The Japan Society of Mechanical Engineers  

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Language：Japanese  

DOI： 10.11511/jacc.47.0.239.0

J-GLOBAL

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Language：Japanese   Publisher：The Japan Society of Mechanical Engineers  

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Language：Japanese   Publisher：The Japan Society of Mechanical Engineers  

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DOI： 10.11522/pscjspe.2004S.0.555.0

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DOI： 10.11511/jacc.46.0.31.0

J-GLOBAL

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DOI： 10.11511/jacc.46.0.243.0

J-GLOBAL

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DOI： 10.11511/jacc.46.0.246.0

J-GLOBAL

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Language：Japanese   Publisher：The Japan Society of Mechanical Engineers  

Integrating MEMS and micro devices has a great potential to realize new haptic interfaces, which exchange multi physical data between persons and machines. The authors have developed two types of new haptic interface devices; an active mouse and an active tripod. They realize physical interaction systems between persons and virtual objects in computers or tele-operated robots. This report shows their designs, control systems, and performances.

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Language：Japanese   Publisher：The Japan Society of Mechanical Engineers  

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Language：Japanese   Publisher：The Japan Society of Mechanical Engineers  

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Language：Japanese   Publishing type：Article, review, commentary, editorial, etc. (scientific journal)  

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Language：Japanese   Publisher：The Institute of Electronics, Information and Communication Engineers  

We have fabricated a touch probe sensor using PZT thin film vibrator. This sensor is for high-precision surface shape measuring tools at low contact force, for example, SPM. The sensor consists of a flat oscillator vibrating in the longitudinal direction. By using the longitudinal vibration, we can obtain higher sensitivity than by using the bending vibration. The vibration was exited and detected by a hydrothermaly deposited PZT thin film device. The length of the vibrator was 9.8 mm, and its resonance frequency was 304.35 kHz. When the driving voltage was 3 V_<p-p> in the resonance frequency, the vibration amplitude at the tip of the sensor was 126 nm_<o-p>. The sensitivity and the resolution were evaluated by experiments. The vertical resolution was estimated to be 2.4 nm.

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Language：English   Publisher：IEEE  

Using PZT thin film, a vibro touch sensor was fabricated. The sensor is for measurement of material surface roughness and surface structure of micro devices such as VLSI up to sub nano meter order resolution without any damages to work piece. The sensor element has flat shape. Base material was titanium thin plate whose thickness was 100 mu m. On both sides of the titanium, PZT film was deposited 10 I-im. The sensor element had half wave length longitudinal vibration mode. The resonance frequency of the sensor was about 304 kHz. The sensitivity of the device is the tangential of the pickup voltage decrease. In the experiment, the tangential was 0.018 mV/nm. From the sensitivity and the noise level, the resolution of the sensor was 2.4 nm.

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Language：Japanese   Publisher：The Institute of Electronics, Information and Communication Engineers  

Hydrothermal method is a unique method to deposit PZT thin film using chemical reaction between titanium substrate and solution.For its application devices, we fabricated a micro ultrasonic motor, a tactile sensor and an earphone for hearing aid.The micro ultrasonic motor was 1.4mm in diameter and revolution speed was 600rpm.The resolution of the tactile sensor was 66nm.This sensor had possibility for being used in the liquid.The earphone for hearing aid generated 60dB sound pressure with 1.3Vrpm.Now we are trying to improve these performances by investigating reaction conditions of hydrothermal method.

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Language：Japanese   Publisher：The Institute of Electronics, Information and Communication Engineers  

This paper proposes the applications using PZT thin film deposited by hydrothermal method. Hydrothermal method utilizes the chemical reaction between titanium base metal and the ions melted in the solution at high temperature. So curved shaped base metals are available. We have succeeded in fabricating micro ultrasonic motor and tactile sensors by hydrothermal method. The motor dimension is 2.4mm in diameter and 10mm long. The output torque was 7μNm and the maximum revolution speed was 880 rpm at 15Vp-p driving voltage. The sensor is 27.8mm long. Its resonance frequency is 115kHz. We have succeeded in sensing contact and the resolution is 1μm.

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